Lithography Related Books

• Advanced Processes for 193nm Immersion Lithography by Yayi Wei and Robert L. Brainard.    
• Chemistry and Lithography by Uzodinma Okoroanyanwu.            
• Computational Lithography by Xu Ma and  Gonzalo R. Arce. 
• Extreme Ultraviolet Lithography by Vivek Bakshi, Anthony Yen.       
• EUV Lithography by Vivek Bakshi.              
• EUV Sources for Lithography by Vivek Bakshi.                                
• Field Guide to Optical Lithography by Chris A. Mack.       
• Fundamental Principles of Optical Lithography: The Science of Microfabrication by Chris Mack.                
• Handbook of VLSI Microlithography by John N. Helbert.                
• Lithography by Michael Wang.           
• Lithography Process Control by Harry J. Levinson.                            
• Microlithography: Science and Technology by Bruce W. Smith, Kazuaki Suzuki.    
• Optical Imaging in Projection Microlithography by Alfred Kwok-Kit Wong.     
• Optical Lithography: Here is Why by Burn J. Lin.                                      
• Photomask Fabrication Technology by Benjamin Eynon, Banqiu Wu.             
• Principles of Lithography by Harry J. Levinson.                                                        
• Resolution Enhancement Techniques in Optical Lithography by Alfred Kwok-Kit Wong.                                              
• Selected Papers on Resolution Enhancement Techniques in Optical Lithography by F. M. Schellenberg.